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Method of surface deformation of body using electromagnetic radiation
Method of surface deformation of body using electromagnetic radiation
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机译:利用电磁辐射对物体进行表面变形的方法
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摘要
A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.
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