METHOD FOR CONTROLLING THE INJECTION AND CONCENTRATION OF A SUPERSATURATION OF EXOTIC ATOMS DEEPLY INTO A SOLID MATERIAL

摘要

A method for controlling the injection of a supersaturation of exotic atoms (1) comprises previously preparing a parent material (2) with buried exotic phases (1) consisting of Ge or Si, irradiating the parent material (2) with electron beams (3), and forming injection regions of supersaturation of the exotic atoms (1) to control the concentration profile of the exotic atoms. The method can control the distribution of concentration of exotic atoms (1) by irradiating electron beams (3) of high energy.