integrated a compensating forces

摘要

This accelerometer is made of a substrate semiconductor - conductor 24 arranged in sandwich-like fashion between two insulating plates 26, 28. A mass of inertia 32 is cut by etching in three dimensions in the substrate semiconductor - conductor 24. On the fourth dimension, it is attachee to the rest of the substrate by a semi-rigid - conductor hinge constituted by flexible blades cross which permit the bending in one direction and are rigid in the other directions. The manufacturing technique makes it possible to to integrate the circuits producing of control and processing the signal on the same substrate 24 as that in which is formed the moving mass 32. / p & & p & the invention is particularly applicable to the guidance by inertia, and the inertial navigation.