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Surface wave launchers to produce plasma columns and means for producing plasma of different shapes
Surface wave launchers to produce plasma columns and means for producing plasma of different shapes
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机译:用于产生等离子体柱的表面波发射器和用于产生不同形状的等离子体的装置
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摘要
The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a serviceable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.
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