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Apparatus for silicon web growth of higher output and improved growth stability
Apparatus for silicon web growth of higher output and improved growth stability
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机译:用于硅网生长的设备,具有更高的产量和更高的生长稳定性
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摘要
This disclosure describes an apparatus to improve the web growth attainable from prior web growth configurations. This apparatus modifies the heat loss at the growth interface in a manner that minimizes thickness variations across the web, especially regions of the web adjacent to the two bounding dendrites. In the unmodified configuration, thinned regions of web, adjacent to the dendrites, were found to be the origin of crystal degradation which ultimately led to termination of the web growth. According to the present invention, thinning adjacent to the dendrites is reduced and the incidence of crystal degradation is similarly reduced.
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