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Specimen mount for secondary ion mass spectrometry and other sensitive particle beam analysis methods and method for the operation thereof
Specimen mount for secondary ion mass spectrometry and other sensitive particle beam analysis methods and method for the operation thereof
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机译:用于二次离子质谱分析和其他敏感粒子束分析方法的样品架及其操作方法
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摘要
A specimen mount for secondary ion mass spectrometry, as well for other sensitive particle beam analysis methods, has a rotatable support element to which at least one carrier is secured, a specimen being affixed to a free end of the carrier. The dimensions of the carrier in directions perpendicular to the propagation direction of the ion or particle beam are smaller than the dimensions of the specimen mounted thereon, so that only the specimen, and no surrounding environment, is in the beam path. The rotatable element is driven so as to move one or more of the carriers with the specimens mounted thereon through the beam path.
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