FORMATION OF IMMOBILIZED ENZYME FILM OF SEMICONDUCTOR ENZYME SENSOR

摘要

PURPOSE:To obviate the contamination of the immobilized enzyme by other enzymes and to make simultaneous and exact measurement of samples of multiple components by applying a water soluble photosensitive resin contg. the enzyme to be immobilized on a water soluble photosensitive resin. CONSTITUTION:The water soluble photosensitive resin is applied by spin coating on a hydrogen ion-sensitive film 6 of a substrate 1 integrated with 3 pieces of hydrogen ion-sensitive transistor elements to form a thin bovine serum albumin film 13. The photosensitive resin is then so exposed that the immobilized bovine serum albumin film 11 remains only on the part of a transistor 12 for reference. The water soluble photosensitive resin is then applied thereon to form a thin glucose oxidase film 10. The unexposed part of the thin film 13 is then partly developed. Further, only the sensitive film 6 of the transistor desired to be formed with the immobilized glucose oxidase film 8 is exposed and developed. After the substrate 1 is dried, the thin film 13 is applied and coated thereon. A thin urease film 9 is then formed. The thin film 9 is photocrosslinked to form an immobilized urease film 7 and the thin film 9 is removed, by which the immobilized enzyme film is formed.