LASER RANGE FINDING AND METHOD FOR CALIBRATING THICKNESS GAUGE USING SUCH RANGE FINDER

摘要

PURPOSE:To improve the reproducibility of a measured value by moving the measuring face of a calibrating piece in a prescribed calibration position without changing the angle to the laser optical axis. CONSTITUTION:A rotating motor 36 which rotates a calibrating piece 34 and an attaching base 38 which fixes this motor to a prescribed position on a linear guide 32 by an attaching member 37 are provided. The calibrating piece 34 is set in a prescribed position and is rotated by the motor 36 without measuring face 34A of the calibrating piece 34 is detected by not only a laser range finder 8 but also a magnet scale. Both measured distances are compared with each other to detect measurement error, and the range finder 8 is adjusted to perform calibration. Thus, the reception light energy intensity distribution of reflected light approximating the intensity distribution of thrown laser light is stably obtained because the variance in surface roughness or reflection factor of the calibrating piece 34 is smoothed, and the reproducibility of the distance or the thickness measured after calibration is improved.