METHOD FOR MEASURING VELOCITY DISTRIBUTION OF PARTICLE AND CONTROLLING METHOD FOR PROCESS BASED ON VELOCITY DISTRIBUTION OF PARTICLE

摘要

PURPOSE:To accurately measure velocity distribution of particles and to enhance the quality of a formed film by irradiating the flying particles generated in a film forming process with laser beams from the three-dimensional directions and measuring the three-dimensional velocity vector components of the flying particles. CONSTITUTION:Gaseous Ar 504 is introduced between a target 502 and a base plate 501 and high voltage is impressed by a DC power source 503 to form plasma. The positive ions of the gaseous Ar 504 are allowed to collide against the target 502 and the beaten-out target atoms are deposited on the base plate 501. At this time, for example Fe is utilized for the target 502 and the pressure of gaseous Ar is regulated to about 50 mTorr and DC power source voltage is regulated to about 3kV and laser beams L1-L3 are wholly set at about 302.064nm wavelength. Laser wavelength is successively scanned in a measuring region in a range of about 1nm from the laser beams L1-13. Fluorescence generated at this time is successively measured by a detector 509. The mean value of velocity vector of the particles incident on the base plate 501 is calculated from these three fluorescence intensity distributions by a personal computer 510 and a process is controlled on the basis thereof.