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Denshikenbikyotoniokerushiryoidosochi

机译:电子微观资本中的深思熟虑措施

摘要

PURPOSE:To extremely facilitate positioning of a sample, by attaching flat springs to a mirror body so that two sample stages rotate reversely to each other by thermal elongation/contraction of the flat springs, and by arranging two drive contact planes in parallel with flat springs respectively and coincident with an axis intersecting a light axis at right angle. CONSTITUTION:Since thermal expansions of the first sample stage 4 appear as radial expansions from a light axis Z serving as a center, drive contact planes 15, 16 only slide against each of rollers 19, 20 of levers 17, 18 and a sample 2 does not change its position. At the same time, the second sample stage 5 also thermally expands and rotates the sample stage 4 counter-clockwise through the first flat springs 7a, 7b. However, the sample 2 does not rotate because of the cancelling clockwise rotation of the sample stage 5 caused by the thermal expansion of the sample stage 4. If the rotation amounts of the sample stage 4 and the sample stage 5 rotated clockwise and counter-clockwise by the flat springs 7a, 7b and 9a, 9b are respectively arranged to be the same by selection the lengths of flat springs, the rotation of the sample 2 caused by the thermal expansions of respective flat springs can be prevented.
机译:目的:为极大地方便样品的定位,将板簧安装在镜体上,使两个样品台通过板簧的热伸长/收缩相互反向旋转,并与板簧平行布置两个驱动接触面分别与与光轴相交成直角的轴重合。组成:由于第一样品台4的热膨胀表现为以光轴Z为中心的径向膨胀,因此驱动接触平面15、16仅在杠杆17、18的每个辊19、20上滑动,而样品2不改变它的位置。同时,第二样品台5也通过第一板簧7a,7b热膨胀并逆时针旋转样品台4。但是,由于由样品台4的热膨胀引起的样品台5的顺时针旋转的抵消,因此样品2不旋转。如果样品台4和样品台5的旋转量为顺时针和逆时针旋转,通过选择板簧的长度,通过将板簧7a,7b和9a,9b分别设置为相同,能够防止由各板簧的热膨胀引起的试样2的旋转。

著录项

  • 公开/公告号JPH0234148B2

    专利类型

  • 公开/公告日1990-08-01

    原文格式PDF

  • 申请/专利权人 NIPPON ELECTRON OPTICS LAB;

    申请/专利号JP19850109658

  • 发明设计人 OKABE HARUYUKI;

    申请日1985-05-22

  • 分类号H01J37/20;

  • 国家 JP

  • 入库时间 2022-08-22 06:22:25

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