PURPOSE:To improve the yield of temperature characteristics and to perform mass production, by measuring the resonance frequency at two arbitrary temperatures actually, obtaining the primary temperature coefficient with calculation and adjusting the primary temperature coefficient with etching. CONSTITUTION:The external shape of an oscillator is formed with etching. Next, the oscillator is located at arbitrary temperatures t1 and t2 and the resonance frequencies f1 and f2 for the temperatures are obtained. The primary temperature coefficient alpha is obtained from the temperatures t1, t2 and the resonance frequencies f1, f2 with calculation. The etching time is determined with the value of the coefficient alpha and the coefficient alpha is made to almost zero with the etching. Through this method, the yield of the temperature characteristics can be improved, a lot of processing can be done at a time, resulting that the cost down can be attained.
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