PRACTICAL RESOLVING POWER EVALUATION METHOD FOR REDUCED PROJECTING ALIGNER

摘要

PURPOSE:To eliminate the irregularity of pattern dimension when a pivotal point is determined by a method wherein the value worked out under a specific condition is used as a pivotal point. CONSTITUTION:A regression analysis is conducted on a resist pattern size using the secondary function of the focus of gx2+hx+i and also by changing the quantity of exposure and the focus and by having (g), (h) and (i) as a coefficient for every quantity of exposure, the quantity of exposure E9 is obtained; and then the value of [i-(h2/4g)] of exposure quantity E9 is worked out from the approximate curved line against the exposure quantity [i-(h2/4g)]. Also, using the data of resist pattern size whose variables are a focus and the quantity of exposure a regression analysis is conducted using the function of f(x)=g(x+ h)2+i, and then (i) of exposure quantity E90 is worked out from the approximate curved line against the exposure quantity of the coefficient (i). The value obtained as above is used as a pivotal point. As a result, the irregularity of measurement results obtained by evaluating persons can be eliminated, and an accurate pivotal point can be obtained.