PURPOSE:To facilitate the attachment and detachment of a specimen without applying damage or stress to the specimen, by providing a dielectric film to the flat surface of a specimen stand and applying voltage between the specimen placed on said film and the specimen stand to hold the specimen by electrostatic voltage. CONSTITUTION:A dielectric substance film 112 comprising a tetrafluoroethylene/ ethylene copolymer is provided to the well polished surface of the specimen holding stand 113 attached to a specimen stand 103. A specimen 114 is placed on said film 112 and voltage is applied between the specimen 114 and the specimen holding stand 113 from a power source 115 to fix the specimen 114 by electrostatic voltage. By this method, the attachment and detachment of the specimen is facilitated without imparting damage or stress to the specimen.
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