ANALYSIS OF HIGHLY PURE SILICON OR BORON CHLORIDE

摘要

PURPOSE:To achieve a microanalysis on an inorganic element compound in a solution, by a method wherein silicon or boron chloride as main component in a sample is absorbed and decomposed to a fluoride by a specified mixed liquid and moreover, a decomposition liquid cleared of the fluoride is concentrated. CONSTITUTION:A sample is supplied to a vaporizer 1 to vaporize the sample completely in substance. The vaporized matter is brought into contact with a mixed liquid of hydrofluoric acid and water in a container 2 so that a chloride of silicon or boron in the vaporized matter is absorbed by the mixed liquid to form a fluoride. After the decomposition of the vaporized matter, the decomposition liquid is heated feeding a highly pure nitrogen gas thereto until the fluoride as main component is removed in substance from the decomposition liquid by evaporation. The left solution is concentrated and then, a quantitative analysis is performed on impurities contained therein by a proper microanalysis method.