Method and apparatus for thin film formation using photo-induced chemical reaction

摘要

An apparatus for thin film formation using a photo-induced chemical reaction comprises a reaction chamber (2) in which a substrate (1) can be set, means (4) to introduce a reactive gas into the reaction chamber (2) for the purpose of causing a surface of the substrate (1) to adsorb the reactive gas, means (8) to evacuate the reaction chamber (2), means (10) to irradiate the substrate surface having adsorbed the reactive gas with photon energy for the purpose of forming a nucieds required for growing a film on the substrate surface, means (6) to generate metastable excited molecules which can react with the reactive gas to decompose it, and means (3, 5) to introduce the reactive gas and the metastable excited molecules into the reaction chamber (2) for the purpose of growing the film on the substrate (1) formed with the nucleus on the basis of the nucleus.