Method of determination of refraction index and layer thickness of thin layers

摘要

The invention relates to a method for determining the refractive index and layer thickness of ultrathin layers. …??In order to determine the refractive index and/or thickness of layers having layer thicknesses  1  mu m, layers which are applied to a solid substrate are recorded by means of surface/plasmon microscopy as a function of the angle of incidence of the irradiating laser beam. …??It is possible in this way to determine layer thicknesses with a vertical resolution /= 0.1 nm in conjunction with simultaneous lateral resolution /= 5 mu m.