APPARATUS FOR SPRAY-DEPOSITING MULTICOMPONENT COATING IN VACUUM

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 in coatings in a vacuum, and can be used in thin-film technology.in order to u043fu043eu0432u044bu0448u0435u043du0438u00a0 quality coatings by u0443u043cu0435u043du044cu0448u0435u043du0438u00a0 dispersal percentage u0441u043eu043eu0442u043du043eu0448u0435u043du0438u00a0 components, the device is equipped with a camera u0440u0435u0433u0443u043bu0438u0440u043eu0432u0430u043du0438u00a0 u0432u00a0u0437u043au043eu0441u0442u0438 u0440u0430u0441u043fu043bu0430 wah is located between the lid and the chamber u0438u0441u043fu0430u0440u0435u043du0438u00a0 and chamber overheating steam filled particles, inert to the u0438u0441u043fu0430u0440u00a0u0435u043cu043eu043cu0443 material, and the size of each particle r aven 0.05 0.01 volume chamber overheating.the camera is equipped with a heater and u0440u0435u0433u0443u043bu0438u0440u043eu0432u0430u043du0438u00a0 u0432u00a0u0437u043au043eu0441u0442u0438 melt filled u043du0438u0442u0435u0432u0438u0434u043du044bu043cu0438 fibers, inert to the u0440u0430u0441u043fu043bu0430u0432u0443, and the area of a u0441u0435u0447u0435u043du0438u00a0 u043au0430u0436u0434u043eu0433 the fiber is equal to 0.01, 0.001 square transverse u0441u0435u0447u0435u043du0438u00a0 chamber u0440u0435u0433u0443u043bu0438u0440u043eu0432u0430u043du0438u00a0 u0432u00a0u0437u043au043eu0441u0442u0438. 1, z. s - lu.