Corona discharge cell - for ozone generation, having ground quartz dielectric layer

摘要

(A) In a corona discharge cell with a dielectric layer which is bonded to a first electrode and which is spaced from a second electrode by an air gap, the dielectric layer consists of quartz with (i) max. 0.76mm thickness and mmore than 161 sq.cm. area or (ii) 0.51mm thickness and more than 103 sq.cm. area, has the same area as the first electrode face and is formed by bonding a quartz layer to the first electrode and then grinding to the required thickness (max. 0.76 mm or 0.51 mm). (B) An ozone generating cell is produced by (a) permanently bonding a dielectric quartz plate to a first electrode; (b) grinding the quartz plate to less than 0.89 mm thickness after hardening the adhesive; and (c) fixing a second electrode relative to the first electrode/quartz dielectric structure to form an air gap between the quartz dielectric and the second electrode. USE/ADVANTAGE - The cell is used to generate ozone esp. for use as process gas in the semiconductor industry, but also for other applications such as water clarification. It generates high purity, high concn. ozone at relatively low operating voltages.