Method and device of determination of the impedance of a discharge in a plasma reactor associated with a box and a regulation of the impedance or of the ionic flow in the reactor.

摘要

Process and device for determining the impedance of a discharge in a plasma reactor associated with a tuning unit and the application to the regulation of the impedance or of the ionic flow in the reactor. / p & & p & the tuning unit 6 comprises the variable capacitors 10, 12 and, according to the invention, it determines the respective states of those - latter and the impedance of the discharge as a function of these states, with the aid of a previously established correspondence between, on the one hand, the states which can be taken by the variable capacitors and, on the other hand, the impedance of the discharge, and possibly the high frequency voltage of the reactor 2, if it is desired to determine the ionic flow relative to the discharge in the reactor.