Method and apparatus for detecting and imaging measuring points that have a defined signal progression

摘要

A method and apparatus for detecting imaging measuring points which have a defined signal progression for testing an integrated circuit and wherein the signals at the measuring points have a defined signal progression and wherein a secondary particle signal is generated using a scanning particle microscope and which makes it possible to quickly locate a measuring point in an integrated circuit at which a defined signal is present or, respectively, assuming there are faults in the electronic modules to identify whether a defined signal has potentially failed and wherein the measured secondary particle signal is compared to the anticipated signal. The comparison can occur using a correlation method and the correlation can be accomplished with the assistance of an electronic correlator or also with the assistance of the particle beam itself. When the particle beam itself is used, the particle beam is modulated with the anticipated signal progression and the resulting secondary particle signal is integrated.