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Non-contacting inductively coupled displacement sensor system for detecting levels of conductive, non-magnetic liquids, and method of detecting levels of such liquids
Non-contacting inductively coupled displacement sensor system for detecting levels of conductive, non-magnetic liquids, and method of detecting levels of such liquids
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机译:用于检测导电的非磁性液体的液位的非接触式感应耦合位移传感器系统以及检测这种液体的液位的方法
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摘要
An inductance coil serves as a displacement sensor arranged in connection with a tuned circuit of an oscillator. Liquid level displacement in an LEC crystal growth environment is sensed as a frequency change in the oscillator circuit as compared to a set point value. The sensor is protected from the environment by an outer protective sheath of non-conductive, non-contaminating material such as boron nitride.
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