Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture

摘要

An improved cathodoluminescence light collection system for use in electron microscopes provides an optical fiber, the facet or aperture of which is positioned adjacent the sample. The cathodoluminescence light, collected by the optical fiber in this manner, may be used to provide spectrally resolved cathodoluminescence images of the sample as well as local cathodoluminescence spectra of the type available in prior art cathodoluminescence light collection systems, but without incurring the numerous disadvantages of such prior art light collection systems. The present invention is relatively inexpensive, far easier to maintain because it does not require use of a mirror and, it is more compact in size thereby making it compatible with the physical limitations of more electron microscopes.