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Mirror mount with annular flat diaphragm encircling circular mirror and including a plurality of actuators
Mirror mount with annular flat diaphragm encircling circular mirror and including a plurality of actuators
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机译:带有环形平面光阑的反射镜支架,环形光阑环绕圆形镜并包括多个致动器
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摘要
A positionally adjustable mirror is supported by an annular flat diaphragm completely encircling the mirror. High stiffness is achieved in the torsional and transverse modes. Low stiffness is achieved in the axial direction without local high stress levels being imposed on the mirror.
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