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WAVEGUIDE, PRISM COUPLER AND PRISM JOINING METHOD
WAVEGUIDE, PRISM COUPLER AND PRISM JOINING METHOD
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机译:波导管,棱镜耦合器和棱镜连接方法
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摘要
PURPOSE:To provide the joint form of a prism with high accuracy by pressing the reference section of the prism to be joined to a pattern for positioning and joining the prism by an adhesive layer. CONSTITUTION:A gap layer 3 is formed of a material having the refractive index lower than the refractive index of an optical waveguide layer 2 on the optical waveguide layer 2 at a prescribed thickness. The pattern 6 for positioning for regulating the joint form of the prism 4 is formed as a projecting part by photolithography on this gap layer 3. An adhesive having the refractive index higher than the adhesive of the optical waveguide layer 2 is applied thinly on the gap layer 3 formed with the pattern 6 for positioning to form the adhesive layer 5. The reference part of the prism 4 to be joined is then pressed to the pattern 6 for positioning to execute the positioning of the prism. The prism 4 is joined by the adhesive layer 5 with high accuracy to the gap layer 3 in this way and the optical performance of the function element is sufficiently exhibited.
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