SPECIMEN HOLDER FOR INFRARED EMISSION SPECTROSCOPY

摘要

PURPOSE:To measure an infrared emission spectrum of a thin film specimen with good accuracy and sensitivity by thermally isolating a specimen holder from the heated specimen and allowing infrared emission from the specimen surface to pass through while other infrared emission from a specimen substrate, a substrate side wall or a heater is shielded. CONSTITUTION:A this film specimen 1 of a substrate is pushed by a heater 2 and a specimen holder 3 from backward to be adhered and fixed to them. Infrared emission having a maximum of radiation intensity in a direction approximately parallel to a surface of the specimen and having polarization characteristics deflected in a direction perpendicular to the specimen surface is radiated from the surface of the specimen 1 which has been heated by the heater 2. At this time infrared emission is radiated also from the surfaces of the holder 3 and the heater 2. The infrared emission can be thermally isolated from the holder 3 by a spacer as well as isolated by a specimen holder cover 4 equipped with an aperture which allows the infrared emission only from the specimen surface to pass through. In addition the surface of the holder cover 4 is finished in a mat with unevenness so that a surface area in parallel with the thin film surface can be remarkably reduced.