IMAGE SHARPENING AGENT IN DISSOLUTION RATE DIFFERENCE DEVELOPING SOLUTION AND DEVELOPING COMPOSITION CONTAINING IT

摘要

PURPOSE:To improve the sharpness of a pattern, to prevent scum, and to enable faithful and sharp transfer, by adding a small amt. of fluorine-contg. alcohol to a dissolution rate difference-applying developing soln. CONSTITUTION:The intended image sharpness increasing agent of the dissolution rate difference developing solution uses as an effective component a fluorine cong. alcohol represented by formula I , II, or III in which X is H, F, CF3CHF, (CF3)2H, or (CF3)CF; R1, R2 are each H or 1-6C alkyl; l is 0-10; m is 0-4; and n is 0-3. This image sharpner is added by 0.001-10wt% to the dissolution rate difference developing soln. used as a developing soln. for forming a pattern in printing and semiconductor industries, such as methyl isobutyo ketone, isopropanol, methyl ethyl ketone, thus permitting sharp transfer even from a fine pattern.