ORGANIC ALUMINUM ELECTROLYTE FOR HIGH PURITY ALUMINUM ELECTRO- DEPOSITION

摘要

PURPOSE: To produce an org. aluminum electrolyte for high purity Al electrodeposition by incorporating fluorinated alkali metal-trialkylaluminum complex, trialkylaluminum and polyfunctional Lewis base in a specified ratio. ;CONSTITUTION: The subject electrolyte is obtained by using the org. aluminum electrolyte containing (a) MF.2AlR₃ (In the formula, M is K or a mixture of K and max. 15mol.% Na), (b) the trialkylaluminum AlR₃ forming no complex with the fluorinated alkali metal and (c) the polyfunctional Lewis base R'- OCH₂CH₂-OR" so that a molar ratio of (a):(b) may be (4:0.6) to (4:2) and the molar ratio of (b):(c) may be (1:0.5) to (1:1) and 3-4.5mol arom. hydrocarbon solvent being liq. at 0°C such as toluene or xylene as the solvent to 1mol fluorinated alkali metal. The electrolyte is high in conductivity, and an Al anode is dissolved in a high selectivity and a dense and high purity Al is deposited electrically by a high current density loading of about 6A/dm².;COPYRIGHT: (C)1991,JPO