METHOD FOR MEASURING FLOW RATE OF LEAKING GAS OF PROCESS GAS SUPPLYING SYSTEM FOR CHEMICAL EQUIPMENT

摘要

PURPOSE:To quantitatively measure the flow rate of the leaking gas between arbitrary positions of the process gas supplying system by calculating the flow rate of the process gas at a mixing point from the concn. decided to be the flow rate of the mixed inert gas. CONSTITUTION:The supply gas system 19 is opened by a 4-way cock 17a to incorporate the slight inert gas into the process gas in the inlet of a fuel battery body 2. The flow rate of the inert gas incorporated therein is subjected to treatments 14f, 14g to obtain the total supply flow rate of the process gas in the inlet of the fuel battery body 2 and at a sampling point 1. The supply gas system 19 is then closed and a supply gas system 20 is opened by the cock 17a to incorporate the inert gas with the process gas in the outlet of the body 2. The flow rate of the inert gas incorporated therein is subjected to the treatments 14f, 14g to obtain the total flow rate in the outlet part of the body 2 and a sampling point 2. The fluctuating flow rate by the chemical reaction of the body 2 is obtd. by a flow rate change computing element 24 from a DC ammeter 4 and load 5 at this time. The difference between the total flow rate at the sampling points 1, 2 and the fluctuating flow rate of the body 2 is computed 14h and the leaking flow rate between the sampling points 1 and 2 is obtd.