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SELF-SUPPORTING THIN FILM FILAMENT TYPE SENSOR,ITS METHOD OF FABRICATION AND ITS APPLICATIONS IN GAS DETECTION AND GAS CHROMATOGRAPHY
SELF-SUPPORTING THIN FILM FILAMENT TYPE SENSOR,ITS METHOD OF FABRICATION AND ITS APPLICATIONS IN GAS DETECTION AND GAS CHROMATOGRAPHY
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机译:自支撑薄膜丝状传感器,制备方法及其在气体检测和色谱分析中的应用
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摘要
Detector of the filament type for determining a static or dynamic characteristic of an ambient medium, constituted by a resistive component intended to be heated by the Joule effect in the medium, and an interface region suitable for reacting with the medium by a physico-chemical process with an effect, depending on the characteristic to be determined, on the electrical characteristic of the interface region, in which there is a supporting member through which there is at least one aperture and at least one filament including the resistive component, composed of one or more thin films and a central portion located in the aperture and end portions via which the central portion is connected to the supporting member.
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