A compact-high gradient accelerator (25) driven by a relativistic klystron (24) is utilized to inject high energy electrons into an X-ray synchrotron radiation ring (26). The high gradients provided by the relativistic klystron (24) enables accelerator structure to be much shorter (typically 3 meters) than conventional injectors. This in turn enables manufacturers which utilize high energy, high intensity X-rays to produce various devices, such as computer chips, to do so on a cost effective basis.
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