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PRE-IONIZATION DEVICE, IN PARTICULAR FOR X-RAY PRE-IONIZATION IN DISCHARGE-PUMPED GAS LASERS, IN PARTICULAR EXCIMER LASERS

机译:特殊准分子激光中的预电离装置,特别是用于X射线预电离的气体激光器中的预电离装置

摘要

a combination of pre ionization, including pre irradiation by x-rays, and discharge gas laser pumped by excimer lasers, in particular, is connected to a pulse generator circuit for a gas laser system.a pulse transformer (pt) of the high voltage is connected to a primary winding (w1) of a storage capacitor (c1) and a high voltage switch (s) in the system pulse generator.the pulse transformer (pt) transmits pulse pre ionization as a combination of pre ionization (ve), including an x-ray tube (rr), the leading to the outbreak of the discharge pulse of laser light. to this end, the pulse transformer (pt) is a saturable magnetic inductor with at least one secondary winding (w2).when the high voltage switch (s) is closed, the primary winding of the pulse transformer (pt) reached its maximum inductivitu00e9 saturated, in order to generate, at that time, in accordance with the law of induction, a secondary pulse voltage.after a predetermined time of 50 to 100 ns, for example, the core is saturated, the inductivitu00e9 (lp) of the primary winding current decreases rapidly, and the flow in the circuit of inversion, resulting in the accumulation of the high voltage at the level of the us in its entirety some of the laser (e1, e2), which triggers the discharge.
机译:包括通过X射线进行预照射的预电离与受激准分子激光器泵浦的放电气体激光器的组合,特别是与气体激光器系统的脉冲发生器电路相连。高压的脉冲变压器(pt)为连接到系统脉冲发生器中存储电容器(c1)的初级绕组(w1)和高压开关(s)。脉冲变压器(pt)传输脉冲预电离作为预电离(ve)的组合,包括X射线管(rr),导致激光放电脉冲的爆发。为此,脉冲变压器(pt)是具有至少一个次级绕组(w2)的可饱和磁电感器。当高压开关(s)闭合时,脉冲变压器(pt)的初级绕组达到最大电感为了在那时根据感应定律产生二次脉冲电压。例如,在50到100 ns的预定时间之后,磁芯已饱和,感应器(lp )的初级绕组电流迅速减小,并且在反向电路中流动,导致部分激光器(e1,e2)整体上以us的电平蓄积高电压,从而触发放电。

著录项

  • 公开/公告号EP0414736A1

    专利类型

  • 公开/公告日1991-03-06

    原文格式PDF

  • 申请/专利权人 SIEMENS AKTIENGESELLSCHAFT;

    申请/专利号EP19890905054

  • 发明设计人 FRIEDE DIRK;BETTE WILLI;

    申请日1989-04-24

  • 分类号H01S3/097;H01S3/0971;H01S3/0977;

  • 国家 EP

  • 入库时间 2022-08-22 05:53:08

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