Corrosion resistant cooling device esp. for excimer laser - comprises low melting metallic layer between corrosion resistant metallic layers

摘要

(A) A corrosion-protected cooling device, for heat transfer from a working fluid to a cooling fluid, includes the following three layers in large area thermal contact: (i) a first layer (1) in direct contact with the cooling fluid and consisting of a metal or alloy with good thermal conductivity and high long term corrosion resistance to the cooling fluid; (ii) a second layer (2) in direct contact with the working fluid and consisting of a metal or alloy with good thermal conductivity and high long term corrosion resistance to the working fluid; and (iii) an intermediate layer (3) of metal alloy which is out of direct contact with both fluids and which has a melting pt. of below 300 deg.C. (B) Prodn. of the cooling device involves introducing the intermediate layer metal or alloy in the molten condition into the space between the first and second layers. USE/ADVANTAGE - Claimed use of the cooling device is in a laser, esp. in an excimer laser with the second layer contacting the excimer laser gas medium and the first layer contacting tapewater. The cooling device has high overall thermal conductivity, is inexpensive and has long service life.