Camera photographing topography of test piece surface - produces Moire image using CCD sensors recording phase shift between object grating and camera reference grating

摘要

A camera (1) with imaging optics (3,13,17,21;33,37) determines the topography of a specimen surface by the prodn. of a Moire image using an object grid (60) applied on the object and a reference grid (65) assigned to the camera, by the phase-shift method. NCCD image recording sensors (6,7,8,9), forming the reference grid, are provided with respectively the same image point geometry in the image plane, N being a natural number greater than 2. The imaging optic includes N-1 colour neutral beam splitters (13,17,21;33,37), which image the incident light (4) in the camera with equal intensity on the N CCD image recording sensors. The "i" CCD image recording sensor of the N CCD image recording sensors is shifted related to the object grid imaged in its image plane, at right angles to the grid lines (66) of the reference grid, about approximately the distance (67) of the i/N times the grid constants of the reference grid. ADVANTAGE - Camera of known type which permits photographs of surface of specimen to be made quicker at high contrast.