High frequency generator for plasma producing consumer - comprises electronic switches, pref. MOSFET transistor, connected to energy supply

摘要

A high freq. generator for a plasma-producing consumer (42) has dual electronic switches (36,38) controlled by a high frequency control signal connected to an energy supply (32). The consumer is connected to the switches (36,38) without a line. The electronic switch is MOSFET transistor controlled by a square-wave control signal (pref. of freq. 1-100 MHz, 1-50 MHz at decay and transition times of 2ns and 5ns) produced by a control switch (56). The energy supply (32) is a direct current supply. Two MOSFET transistors, which can be controlled by push-pull operation, are arranged in a halfbridge switch between the energy supply (32) and consumer (42) or four MOSFET transistors are arranged in a full-bridge switch between them. ADVANTAGE - Almost full electrical efficiency is produced without the need for intermediate switches of a suitable network.