首页> 外国专利> Films having in their thickness at least two superimposed zones, including an insulating zone and a conductive zone, and the production thereof by irradiating a polymer film by means of a beam of high energy ions

Films having in their thickness at least two superimposed zones, including an insulating zone and a conductive zone, and the production thereof by irradiating a polymer film by means of a beam of high energy ions

机译:具有至少两个重叠区域(包括绝缘区域和导电区域)的厚度的薄膜,以及通过用高能离子束辐照聚合物薄膜来生产薄膜的方法

摘要

The invention relates to the production of films having in their thickness at least two superimposed zones, including a semimetallic zone and an electrically insulating zone, by irradiating a polymer film by means of a high energy ion beam.PPIt is possible by this process to produce semimetal (1)/insulant (2)/semimetal (3) structures by irradiating the polymer under vacuum by means of light ions or with a limited stopping power having an energy of at least 1 MeV/amu. It is also possible to obtain insulant (4)/semimetal (5)/insulant (6) structures by irradiating, in a confined atmosphere, the polymer by means of heavy ions or ions having a high energy loss with by energy of least 1 MeV/amu. PPBy irradiating only certain zones of the film, it is thus possible to form embedded or surface-positioned electrical connections.
机译:本发明涉及通过用高能离子束辐照聚合物膜来生产在其厚度上具有至少两个重叠区的膜,所述至少两个重叠区包括半金属区和电绝缘区。通过该方法可以通过在真空下借助光离子或以能量至少为1 MeV / amu的有限的终止辐射辐射聚合物来生产半金属(1)/绝缘体(2)/半金属(3)结构。也可以通过在密闭气氛中通过重离子或能量损失高的离子以至少1 MeV的能量照射聚合物来获得绝缘体(4)/半金属(5)/绝缘体(6)结构通过仅照射膜的某些区域,因此可以形成嵌入式或表面定位的电连接。

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