Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations

摘要

In an optical encoder using a collimated lighting system, an index scale is inclined toward a main scale by a predetermined value. With this arrangement, a component of variation in the detection signal due to variations in the grating gap can be offset or integrated to be removed from a geometric image of the first grating in the detection signal, whereby the dependence of an S/N ratio of the detection signal on the grating gap can be avoided.