SURFACE PROTECTION MEMBER TO ELIMINATE CONTAMI- NATION INDUCED BY FINE PARTICLES CON- TAMINATION RESULTANT FROM DUST OR SOOT AND SURFACE PROTECTION METHOD USING THIS MEMBER

摘要

PURPOSE: To prevent the surface of an object in super-clean air environment from being contaminated with fine particles of dust and dirt. CONSTITUTION: A supper-clean air coming from a blast means is blown from a blownout hole 6, formed at a blast surface 7 to the space between the blast surface 7 and an object 10, with the blast surface being complimentary in shape, at least to the exterior shape of a surface 11 which is to be protected. A separation (d) between the surface 11 and the blast surface 7 is relatively short, while the surface 11 and the blast surface 7 face each other so as to have their surfaces parallel, and the super-clean air blown between the surface 11 and the blast surface 7 covers at least the surface of to-be-protected surface 11 in a thin layer.