ALLOY FOR REFINING ULTRAHIGH PURITY RARE GAS AND ITS UTILIZING METHOD

摘要

PURPOSE:To offer an allay used for the convertion of rare gas such as Xe into ultrahigh one and its refining method. CONSTITUTION:As the alloy, an Mg-Ca series and a Zr series are used. The Mg-Ca series is blended with, by atom, 20 to 90% of at least one kind selected from the group constituted of Ni, Cu, Co, Mn, Fe and Cr, and the Zr series is blended with 10 to 70% of at least one kind of element selected from the group constituted of V, Mn, Fe, Cr and Co and 1 to 20% Ni. Not only impurity gas components of an O-N-H hydrocarbon series but also impurity gas components of an S-F-P compound series are effectively removed, and as for the following, in the case of Xe gas, it is reduced to =3.0ppm in total.