GRINDING METHOD FOR SI3N4 CERAMICS AND WORK PRODUCT THEREOF

摘要

PURPOSE:To obtain a sufficiently smooth surface roughness, by performing grinding under the conditions that the contact pressure of the body to be ground and abrasive grain is larger than the hardness of the body to be ground, and the temperature at the contact point of the body to be ground and abrasive grain is more than the temperature causing a plastic fluid bed on the surface of the body to be ground. CONSTITUTION:Si3N4 ceramics is subjected to grinding under the conditions that the contact pressure of the body to be ground and abrasive grain is larger than the hardness of the body to be ground, and the temperature at the contact point of the body to be ground and abrasive grain is more than the temperature causing a plastic fluid bed on the surface of the body to be ground. Consequently, a work product of Si3N4 ceramics whose work surface roughness is Rmax0.1mum in the max.height roughness and the bend strength thereof is =100kg/mm2, is obtained.