MANUFACTURE OF AL-TA BASED ALLOY TARGET PLATE MATERIAL FOR SPUTTERING

摘要

PURPOSE:To reduce slitting, crack and segregation by using a vertical mold fitting a tapered heat radiation plate. CONSTITUTION:In the mold for finishing a molten metal to an ingot-shape after vacuum-melting Al alloy containing Ta (0.5-10.0atm%), the vertical mold fitting the tapered heat radiation plate 3 is used. By this method, Al-Ta based sputtering target having less splitting, crack and segregation is obtd.