FOURIER-TRANSFORM INFRARED EMISSION SPECTROMETER AND METHOD FOR ADJUSTING OPTICAL SYSTEM OF THE SAME

摘要

PURPOSE:To efficiently lead infrared emission into an interferometer and measure the infrared emission with maximum efficiency by adjusting an interference optical system so that interference of visible laser light emitted from an interferometer is maximum. CONSTITUTION:By rotating and adjusting a semitransparent mirror 5, reflection light of the laser light 11 generated from a visible laser 10 is incident on the center of a semitransparent mirror 7, a moving mirror 8 and a fixed mirror 9 of an interferometer. A part of the laser light 11 is reflected by a semitransparent mirror 6, and after it has transmitted through the semitransparent mirror 5, it transmits through a polarizer 4 and incident on the surface of a thin film specimen 2. Thus infrared emission 3 generated from the specimen 2 is efficiently incident on the interferometer correctly. Further the laser light beams which have been divided into two by the semitransparent mirror 7 of the interferometer and reflected by the moving mirror 8 and the fixed mirror 9 respectively are overlaid by the semitransparent mirror 7 again to interfere with each other. This interference intensity 12 can be maximized by adjusting the semitransparent mirror 7 or the fixed mirror 9. Thus adjustment of the optical system and optimization of interference conditions are possible, thereby measuring the infrared emission with maximum efficiency.