THIN-FILM ELEMENT SENSOR WHOSE TEMPERATURE CHARACTERISTIC IS STABILIZED

摘要

PURPOSE:To eliminate the temperature difference between a part where elements are concentrated and a part where elements are very few and to improve the detecting accuracy of a thin film element sensor by forming bridge circuits on a substrate by using thin films, and forming heaters surrounding the circuits. CONSTITUTION:An NiFe thin film is formed on a glass substrate 1, and a plurality of bridge circuits 3 are formed by etching. Thin-film ferromagnetic resistor elements at the outer surfaces of the circuits 3 are made to remain in etching. The elements are made to be heaters 2. A voltage is applied to the heaters 2 from an other power supply. Therefore, even if the temperature of a part where elements are concentrated is increased during the detection, the temperature of the outer surfaces where the elements become very few is increased with the heaters 2. Thus the temperature difference can be eliminated. In this way, the irregularities of the temperatures among the elements are corrected, and the detecting accuracy is improved. The device can be manufactured at the same time as the element sensor, and the manufacture can be made simple and easy.