CYLINDER UNIT EMPLOYING ULTRASONIC WAVE MOTOR

摘要

PURPOSE:To improve starting operation in a low speed region, driving operation for stoppage and stopping accuracy by generating a traveling wave on a resilient body in order to drive a rotor and driving a piston rod with low speed in a predetermined direction through a ball screw and a piston. CONSTITUTION:Extending/contracting motion is induced in a piezoelectric body 14a and standing waves are generated on a resilient body 14b secured to the piezoelectric body 14a by means of first and second high frequency power supplies 16, 17, respectively. Two standing waves are combined into a unilateral traveling wave. A rotor 15 is rotated reversely to the traveling wave formed on the resilient body 14b. A ball screw 4 interlocked with the rotor 15 is then rotary driven in same direction, e.g. counterclockwise when viewed from a piston rod 3 side, and a piston 3 screwed with the ball screw 4 is driven rightward at low speed.