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Method of producing optical waveguides by an ion exchange technique on a glass substrate
Method of producing optical waveguides by an ion exchange technique on a glass substrate
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机译:通过离子交换技术在玻璃基板上制造光波导的方法
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摘要
The invention relates to a method of producing waveguides (6) by an ion exchange technique on a glass substrate (1). In order to be able to alleviate the tolerances allowed for the ion exchange technique, waveguides (3) are formed by first diffusing ions which increase the refractive index into the glass substrate (1) over an area wider than the optical waveguides to be produced (6). A positive-type ion exchange mask (4) is formed thereon, and finally the ions which increase the refractive index are taken off by using the ion exchange technique in the regions having no mask.
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