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Waveguide type second-harmonic generation element and method of producing the same

机译:波导型二次谐波产生元件及其制造方法

摘要

A waveguide type second-harmonic generation element includes a substrate (1) made of LiTaO₃, approximately parallel domain inversion regions (30, 30A, 72) formed on the substrate and extending in a first direction, where the domain inversion regions have a first depth into the substrate, approximately parallel domain non-inversion regions (30B, 71) formed on the substrate and extending in the first direction, where the domain inversion region and the domain non-inversion regions alternately occur on the substrate, and an optical waveguide (4, 4A, 4B) formed on the substrate and traversing the domain inversion regions and the domain non-inversion regions, where the optical waveguide has a second depth and extends in a second direction which is approximately perpendicular to the first direction.
机译:波导型二次谐波产生元件包括由LiTaO 3制成的衬底(1),形成在该衬底上并沿第一方向延伸的大致平行的畴反转区(30、30A,72),其中该畴反转区具有第一深度。进入基板,在基板上形成并在第一方向上延伸的大致平行的畴非反转区域(30B,71),在基板上交替出现畴反转区域和畴非反转区域,以及光波导(图4,图4A,图4B)形成在基板上并横越畴反转区域和畴非反转区域,其中光波导具有第二深度并且在近似垂直于第一方向的第二方向上延伸。

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