optical fehlerinspektionsvorrichtung detection in a flat transparent plates or blattförmigen material of finite thickness existing fehlerstellen and its location between the ober - and underside of th

摘要

An optical defect inspection arrangement passes light from a source (11) via a mirror (13) perpendicularly to the inspected object. A receiver passes light reflected from a region of the object via a lens to a photoreceiver arrangement connected to an electronic defect analyser. The illumination mirror forms an image of an illumination pupil (10) via the object in the lens (15) of a photoreceiver camera (16) on whose photoreceiver arrangement (19) the image of the inspection region (17) is formed. USE/ADVANTAGE - Precise detection of defects in flat transparent plates or plate shaped material without mechanically and optically expensive illumination arrangement.