首页> 外国专利> Heterodyne double interferometer with signal detector - passes reference and measuring beams over common paths and compensates for systematic errors

Heterodyne double interferometer with signal detector - passes reference and measuring beams over common paths and compensates for systematic errors

机译:带有信号检测器的外差式双干涉仪-在公共路径上通过参考光束和测量光束并补偿系统误差

摘要

A heterodyne double interferometer uses intensity division of the coherent radiation from a coherent source. Both beams are passed via the same reference and measurement paths and their measurement signals detected separately and processed so systematic, periodic errors are compensated. In addition or alternately, the measurement signals can be detected with opposite signs to achieve a doubling of the resolution of the phase angle between two interference events. ADVANTAGE - Enables expansion of phase measurement to be achieved with improved interpolation by compensation of periodic systematic errors which can occur in polarisation optical version.
机译:外差双干涉仪使用来自相干源的相干辐射的强度划分。两条光束都经过相同的参考和测量路径,并且它们的测量信号被分别检测和处理,因此可以补偿系统的周期性误差。附加地或替代地,可以以相反的符号检测测量信号,以实现两个干扰事件之间的相角分辨率的加倍。优势-通过补偿可能发生在偏振光学版本中的周期性系统误差,可以通过改进的插值来扩展相位测量。

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