LCD support panel with improved electrode structure - uses internal electrodes of indium, tin and palladium oxide(s) and an external array strengthened by additional metal deposition

摘要

Liquid crystal displays (LCD) consist of a large area, pref. glass, panel (1,2,3) and a smaller covering panel (5). The electrode contacts (4,8) on the larger panel are made from a thin film of SnO2, In2O3 and PdO, applied by sputtering, in which the pattern of electrodes is formed by a photolithographic process. The electrodes (4) which will be in contact with the liquid crystal are then covered with a thin film of SiO2.P2O5, SiO2 or SiO2.TiO2. The external parts (8) of the electrode pattern are then coated with an additional metal layer. Then an orientation layer for the liquid crystal is deposited on the insulation layer covering the internal electrode array and the small covering panel (5), carrying its electrode array, placed on top. The cell is then completed by inserting the liquid crystal (10), sealing the cavity (7) and adding external components (9) to the larger panel. The conductive oxide layer is pref. deposited by sputtering the metals and oxidising the layer by an anneal, or by reactive sputtering using one or 2 targets. In the latter case one of the targets is PdO or PdO2. The additional metal layer applied to the external electrode array (8) is pref. Ni, Cu, Au, etc., and may be applied directly or after reducing PdO to Pd in the external array. USE/ADVANTAGE - Provides electrode arrays with different properties for different tasks. The external electrodes allow direct bonding of TAB packages to the glass panel. The process is suitable for mass production.