Photosensitive substrate layer structuring system using laser scanning - incorporates micro-scanning for deflection of laser beam by fraction of scanning line width

摘要

The photosensitive substrate layer structuring system uses a laser beam scanned across the surface of the substrate layer in straight horizontal lines. Each structural element is formed by a series of scan lines perpendicular to the scanning direction, with auxiliary micro scanning for deflection of the laser beam by a fraction of the scan line width. Preferably, the micro scanning is effected via an acousto optical deflection device (16) in the path of the laser beam (13) in front of the main deflection device (17). ADVANTAGE - Improved resolution relative to spot size.