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The looper system, in particular for the purely space application
The looper system, in particular for the purely space application
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机译:弯针系统,特别是纯空间应用
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摘要
The description relates to a manipulator, especially for use in clean rooms, with a basic section which can be attached to a handling device or the like and on which there are two manipulating flanges having a linear part (2, 2') which is movable along its longitudinal axis so that the manipulating flanges can perform an adjusting movement for handling wafers, carriers or the like. The invention is noteworthy in that at the forward end of each linear part (2, 2') there is a rotary unit (4, 8), the shaft (11) of which extends almost perpendicularly to the longitudinal axis of the linear part (2, 2') and bears at least two different manipulating components (13, 14, 16).
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