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The looper system, in particular for the purely space application

机译:弯针系统,特别是纯空间应用

摘要

The description relates to a manipulator, especially for use in clean rooms, with a basic section which can be attached to a handling device or the like and on which there are two manipulating flanges having a linear part (2, 2') which is movable along its longitudinal axis so that the manipulating flanges can perform an adjusting movement for handling wafers, carriers or the like. The invention is noteworthy in that at the forward end of each linear part (2, 2') there is a rotary unit (4, 8), the shaft (11) of which extends almost perpendicularly to the longitudinal axis of the linear part (2, 2') and bears at least two different manipulating components (13, 14, 16).
机译:本说明书涉及一种操纵器,特别是用于无尘室的操纵器,其基本部分可以固定在操纵装置等上,在操纵器上有两个操纵法兰,它们具有可移动的线性部分(2、2')。沿其纵轴方向移动,以便操纵法兰可以执行调节运动,以搬运晶圆,载体等。本发明值得注意的是,在每个线性部分(2、2')的前端有一个旋转单元(4、8),其轴(11)几乎垂直于线性部分(2)的纵轴延伸。 2、2'),并带有至少两个不同的操纵组件(13、14、16)。

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